中文摘要：

采用液相沉积法,在低温下制备TiO2薄膜,研究了制备条件对薄膜中TiO2的晶型、薄膜厚度、透光性、亲水性及光催化活性的影响。结果表明,在90℃下制备的TiO2为锐钛矿型,薄膜的厚度与反应温度、沉积时间、HBO3的加入量及反应物浓度有关,所制备的薄膜具有良好的光诱导超亲水特性和光催化活性,在可见光区的透光率〉80%。

英文摘要：

TiO2 thin film was prepared with liquid phase deposition method at low-temperature.The effects of preparing conditions on the crystal structure,thickness,transmittance,hydrophilicity and photocatalytic activity of TiO2 thin film were studied.The results indicate that the TiO2 thin film prepared at 90℃ is anatase,the film thickness is determined by reaction temperature,deposition time,H3BO3 molar ratio and solution concentration.The photocatalytic activity and the hydrophilicity of TiO2 film are good.The transmittance of TiO2 thin film is above 80% in visible region.