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中文摘要：
在浅体声波（SSBW）器件上采用真空热蒸发法制备MgF2波导层，研究了器件的频率、插损、质量灵敏度随波导层厚度变化的特性。当波导层厚度约为2.48μm时，器件的插损最小（-23.93dB）；当波导层厚度约为6.5μm时，器件获得了最大质量灵敏度416.7cm^2·g^-1。并分析了不同沉积速率对薄膜质量的影响。实验结果表明：要制备高质量的薄膜必须采用低的薄膜沉积速率，MgF2薄膜可作为乐甫波器件的波导层材料。
英文摘要：
Magnesium fluoride guiding layer films is deposited on SSBW device by vacuum thermal evaporation. Frequency, insertion loss and mass sensitivity of the devices changed by the thickness of guiding layers are studied. A much low insertion loss of -23.93 dB is achieved when the thickness of guiding layer is about 2.48μm. The maximum sensitivity is up to 416.7cm^2·g^-1 of magnesium fluoride film with thickness of 6.5μm. Influence of different deposition rate to the quality of the films is analyzed. The results show that high quality films can be attained by using low deposition rate, and magnesium fluoride can be used as guiding layer material of Love wave device.
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