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Single-shot reflective shearing point diffraction interferometer for wavefront measurements
  • ISSN号：1559-128X
  • 期刊名称：Applied Optics
  • 时间：2015.7.10
  • 页码：6155-6161
  • 相关项目：短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
作者： Chen, Lei|Gu, Chenfeng|Wan, Jun|Zheng, Donghui|
同期刊论文项目
短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
期刊论文 26 会议论文 2
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