中文摘要：

为对等离子体中间自由基物种进行质谱诊断,设计一种利用激光,电离技术对大气压脉冲放电等离子体中性自由基进行电离再由分子束飞行时间（MB-TOF）质谱诊断的实验装置,并通过该装置对C6H6/Ar脉冲放电等离子体进行实验研究,测得C4H2、C4H9、C5H5和C6H3等许多自由基物种.实验结果表明,MB-TOF可以诊断等离子体中的自由基.

英文摘要：

A molecular-beam time-of-flight（MB-TOF） mass spectrometer combining laser ionization was developed to diagnose free radical species in plasmas.MB-TOF was used to study on pulsed C6H6/Ar discharge plasma,and laser ionized neutral radicals such as C4H2、C4H9、C5H5 and C6H3 were measured.Tests indicate that the developed MB-TOF technique has the capability to diagnose the neutral radicals in complicated plasma conditions.