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KDP晶体真空吸附方式对加工面形精度的影响
  • 期刊名称：佳木斯大学学报
  • 时间：0
  • 分类：TG501.1[金属学及工艺—金属切削加工及机床]
  • 作者机构：[1]哈尔滨工程大学机电工程学院,黑龙江哈尔滨150001, [2]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001, [3]佳木斯大学,黑龙江佳木斯154007
  • 相关基金：基金项目：国家自然科学基金重点项目（50535020）,中国博士后科学基金（20070410889）,哈尔滨市科技人才创新基金（2007RFQXG038）
  • 相关项目：各向异性软脆功能晶体高效精密和超精密加工技术基础
关键词： KDP晶体, 真空吸附, 面形精度, KDP crystal, vacuum chuck, profile accuracy
中文摘要：

建立KDP晶体与真空吸盘间有限元接触模型，并利用该模型分析吸气孔和吸气槽真空吸盘对KDP晶体面形精度的影响，分析了不同直径的吸气孔真空吸盘对KDP晶体变形的影响。结果表明：增大真空吸盘的占空比，可以减小完全吸附所需的真空度。吸气孔的直径越小，表面的变形越小。研究还发现，采用吸气孔吸附方式比采用吸气槽吸附方式可以得到更理想的面形质量。该结论对提高KDP晶体面形精度有着重要指导意义。利用超精密机床采用真空孔吸附方式加工KDP晶体，加工出面形精度为1／2X的表面。

英文摘要：

A contacting model of KDP crystal attaching to vacuum chuck is established by finite element method to analyze the effects of vacuum chuck with hole and chuck with channel on the profile accuracy. Moreover, the influence of different hole in diameter of the vacuum chuck on the KDP crystal deformation is analyzed too. The result shows that the increase of vacuum ratios of vacuum chuck makes the vacuum degree of adsorption reduce. The smaller the vacuum chuck with hole diameter, the less the surface deformation. The study also discovered that vacuum chuck with hole is better than the that with channel on profile accuracy. The KDP crystal is machined by an ultra-precision machine tool and vacuum chuck with hole. Experimental result of profile accuracy is 1/2 wavelength.

同期刊论文项目
各向异性软脆功能晶体高效精密和超精密加工技术基础
期刊论文 56 会议论文 15 获奖 1
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