利用低温(200℃)生长的GaAs材料作为吸收层制备了GaAs基1.55μm谐振腔增强型(RCE)光电探测器,对其光电特性进行了分析、研究.无光照0偏压下探测器暗电流为8.0×10^12A;光电流谱峰值波长1563nm;响应谱线半宽4nm,具有良好的波长选择性.
1. 55 μm resonant cavity enhanced photodetector was fabricated using low-temperature grown GaAs as the absorption layer. Its electrical and optical characteristics were investigated. Under 0 V bias without incident light the dark current was 8×10^-11 A, the peak wavelength of the photocurrent was 1563 nm with fullwidth at half maximum(FWHM) 4 nm.