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中文摘要：
椭圆偏振光谱法是一种非破坏性光谱技术。为了获得微波等离子体化学汽相沉积（MPCVD）金刚石薄膜的最佳沉积条件,用红外椭圆偏振光谱仪对MPCVD金刚石薄膜的红外光学性能进行了表征测量,并分析了衬底温度和反应室的压强对金刚石薄膜的红外光学性质的影响。当甲烷浓度不变,衬底温度为750℃,反应室的压强为4.0kPa时,金刚石膜的红外椭偏光学性质达到最佳,其折射率的平均值为2.393。研究结果表明,金刚石薄膜的光学性能与薄膜质量密切相关,同时也获得了最佳的金刚石薄膜工艺条件。
英文摘要：
Spectroscopic ellipsometry is a non-distructive spectroscopic technique.To find the optimal Microwave Plasma Chemical Vapour Phase Deposition（MPCVD） condition of diamond thin films,the infrared optical properties of diamond thin films are characterized by using an infrared spectroscopic ellipsometric spectrometer.The influence of substrate temperature and chamber pressure on the infrared optical properties of diamond thin films is analyzed.It is found that the optimal infrared spectroscopic ellipsometric properties and an average refractive index of 2.393 can be obtained for the diamond thin films with a constant methane concentration,a substrate temperature of 750℃and the chamber pressure of 4.0kPa.The result shows that the optical properties of diamond thin films are closely related to their quality.
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