中文摘要：

为了研究超声振动对飞秒激光微加工的影响，设计超声辅助装置，进行石英光纤材料的微结构加工试验。探讨不同功率的超声振动对材料加工表面质量及孔深的影响，明确超声辅助飞秒激光加工的作用机理。引入超声振动后，光纤侧面烧蚀的矩形槽壁面更为平整，残留碎屑明显减少，槽或孔的深度有所增加；在超声功率为30w时，孔的锥度由7．34°减小到4．17°。结果表明，超声振动能有效改善材料加工表面质量，增加加工孔的深度，提高飞秒激光的加工效率，证明超声振动对飞秒激光加工具有明显的改善作用。

英文摘要：

To study the effects of the ultrasonic vibration on femtosecond laser micromachining, an ultrasonic aided device is designed, and the laser micromachining experiments of fiber optic materials are carried out. The effects of the ultrasonic vibration with different powers on surface quality and the drilling depth are investigated. And the mechanism of the ultrasonic vibration aided laser machining is analyzed. After introducing the ultrasonic vibration, the inner surface of the ablated trench is cleaner, the residue debris on surface is significantly reduced, and the drilling depth is increased. When the ultrasonic power is 30 W, the taper of the hole is reduced from 7.34~ to 4.17~. The results show that, ultrasonic vibrations can effectively improve the surface quality of materials, increase the depth of the drilled hole, improve the efficiency of the femtosecond laser processing. It is also confirmed that, the ultrasonic vibration has significant effect on improving femtosecond laser processing performance.