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Initial decomposition of methyltrichlorosilane in the chemical vapor deposition of silicon-carbide
  • ISSN号：2210-271X
  • 期刊名称：COMPUTATIONAL AND THEORETICAL CHEMISTRY
  • 时间：0
  • 页码：265-272
  • 语言：英文
  • 相关项目：基于化学元素预测新型高温透波陶瓷的相结构与性质
作者： Wang, Xin Su, Kehe Deng, Juanli Liu, Yan Wang, Yan|
同期刊论文项目
基于化学元素预测新型高温透波陶瓷的相结构与性质
期刊论文 34
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