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Preparation of CrN thick films by high-rate middle-frequency unbalanced magnetron sputtering
  • ISSN号：0042-207X
  • 期刊名称：Vacuum
  • 时间：0
  • 页码：1459-1463
  • 语言：英文
  • 相关项目：离子注入制备多铁性过渡金属化合物CdMeS
作者： Yang, B.|Zou, C.W.|Rong, S.Q.|Fu, D.J.|Tian, C.X.|Liu, C.S.|He, J.|Guo, L.P.|Wang, H.J.|
同期刊论文项目
离子注入制备多铁性过渡金属化合物CdMeS
期刊论文 27 会议论文 3
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