微区能量色散X射线荧光光谱仪(μ-EDXRF)是进行物质微区成分分析和元素分布分析的工具,在定性和半定量分析中发挥着重要的作用,被广泛应用于地质学、考古学、材料学等领域。本文对μ-EDXRF的晶体分析谱图中常出现的一些干扰峰进行研究,总结出识别、减小与消除干扰峰影响等问题的方法,确保分析结果的准确性。
The microenergy dispersive X-ray fluorescence spectrometry (μ- EDXRF) can provide the information of the micro-area chemical components and the distribution of elements for the materials, which plays an important role in the qualitative and semi-quantitative analysis. It is widely used in geology,archeology and material science. The μ-EDXRF in this paper was used to study the interference peaks in crystal analysis. The methods to identify, reduce and eliminate the interference peaks were summarized. The research methods would be contributed to ensure the accuracy of the results of crystalline x-EDXRF analysis.