中文摘要：

压电型微固体模态陀螺是一种利用压电材料制作的新型固态微陀螺，具有高抗冲击、抗震动能力。陀螺主要部分为一压电质量块，研究发现其存在某阶特殊的振动模态作为原振动，通过感应哥氏力将敏感方向上输入的角速度转化为电信号。陀螺上设置有多个电极，各电极在工作状态下输出压电电压信号，通过检测电路测量信号间的相位差分析陀螺状态。TL714高速比较器将正弦信号转换为方波信号，通过TMS320F2812芯片采集数据进行处理，实现了对两路频率范围100KHz－600KHz信号的相位差检测。实验结果验证了该检测方法的有效性。

英文摘要：

Piezoelectric solid-state micromachined modal gyroscope is a kind of novel solid-state gyroscope made of piezoelectric materials, with high resistant to impact and vibration. Researchers have found the existence of a special-order vibratory mode in the piezoelectric mass as the original vibration inducing Coriolis forces. The angular velocity in sensitive direction can be converted to electrical signals. There are some electrodes on gyroscope with the output of piezoelectric voltages and the phase difference between these signals could be detected. The model statues of this gyroscope could also be analyzed. The TL714 high-speed comparator can convert the sinusoidal signal to the square wave signal, and the TMS320F2812 chip can collect and process data. In this way, the phase difference between two signals in 100KHz ~ 600KHz can be detected. The availability of this method has been proved by the results of experiment.