中文摘要：

基于光学相控阵理论和钛扩散铌酸锂光波导的导模特性，提出了一种新型阵列集成光波导应用于光学相控。根据光束传输法（BPM），并结合现有半导体工艺水平及参数，对该阵列波导的导光特性，损耗特性以及耦合特性进行了仿真计算，最终给出了相控阵的结构设计参数。结果表明，应用该集成阵列波导的光学相控阵结构可实现光束连续精确定向偏转，偏转角度可达±4．5°，相位控制半波电压小于6V，其系统光学控制单元损耗低且响应速度快。

英文摘要：

Based on the theory of the optical phased array （OPA） and behavior of the mode propagation in Ti-diffused Lithium Niobate （Ti_LiNbO3） waveguide, a novel array of integrated optical waveguides applied in OPA system was proposed. According to the beam propagation method （BPM） and the existing semiconductor technology and parameters, optical characteristics of the waveguide array, loss characteristics, and coupling characteristics were simulated. The structure of phased array parameters was presented. Simulation result shows that the OPA based on the array of integrated optical waveguides performs well. This array of integrated optical waveguides can steer consequently and precisely with the steering angle of more than ±4.5°. The half-wave voltage is less than 6 V, and the control unit has low loss and quick response.