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Adhesion effect of interface layers on pattern fabrication with GeSbTe as laser thermal lithography
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2013.1.1
  • 页码：7-11
  • 相关项目：相变信息存储材料的快速相变机制和策略研究
作者： Yongyou Geng|Yiqun Wu|Yang Wang|Jingsong Wei|
同期刊论文项目
相变信息存储材料的快速相变机制和策略研究
期刊论文 37 会议论文 4 著作 1
同项目期刊论文
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Super-resolution readout property of bismuth-doped antimony-based thin film as a functional mask for
AgInSbTe相变薄膜的热刻蚀腐蚀特性
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Comparison of optical transients during the picosecond laser pulse-induced crystallization of GeSbTe
Nonlinear two-photon absorption properties induced by femtosecond laser with the films of two novel
VO2-like thermo-optical switching effect in one-dimensional nonlinear defective photonic crystals
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Rapid phase change induced by double picosecond laser pulses and the dynamics of acoustic phonons
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XPS study on the selective wet etching mechanism of GeSbTe phase change thin films with tetramethyla
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Description and reconstruction of one-dimensional photonic crystal by digital signal processing
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激光光刻技术的研究与发展
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Controllable crystallization of Ge2Sb2Te5 phase-change memory thin films driven by multiple femtosec
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Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgI
锑铋合金薄膜的光学常数
Sb80Bi20光学非线性纳米薄膜的超分辨效应
Progress of super-resolution near-field structure and application in optical data storage
Polarization readout analysis for multilevel phase change recording by crystallization degree modulation