对声表面波(SAW)扭矩传感器的关键技术进行了研究。分析了SAW扭矩敏感的原理,并完成了SAW谐振器(SAWR)基片切型的优化选择和谐振器设计;设计了基于相关延拓和质心法的频率估计算法,以适应低信噪比的实际工况。设计并搭建了SAW扭矩传感器试验测试系统。试验结果为:在轴径为45mm的弹性体上的SAW扭矩传感器的扭矩灵敏度为1.92(Hz·(N·m)-1);线性度和重复性分别为0.21%和0.23%。表明:所开发的无线无源SAW扭矩测量系统在技术上是完全可行的。
The key techniques of surface acoustic wave (SAW) torque sensor were studied. The sensing mechanism of SWA torque was analyzed. Optimal selection of the cut angle of SAW resonator (SAWR) substrate was carried out and the resonator was designed. The frequency estimation algorithm based on correlation extension and centroid algorithm was designed to adapt to the actual working condition of low signal to noise ratio. The SAW torque sensing system was designed and constructed. Test results showed that when applied to an elastomer of 45 mm diameter, the sensitivity of proposed SAW sensor was 1.92 (Hz · (N· m) -1) , the linearity and repeatability were 0.21% and 0.23%, respectively, which veri- fied that the proposed passive wireless SAW torque sensing system was technically feasible.