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Reconstruction of ion energy distribution function in a capacitive rf discharge
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：0
  • 页码：024210-1-024210-4
  • 语言：英文
  • 相关项目：高频电负性容性耦合等离子体的研究
作者： Chen W.C.|Zhu X.M.|Pu Y.K.|Zhang S.|
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高频电负性容性耦合等离子体的研究
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