中文摘要：

提出一种新型的对偶子式的压电微悬臂双梁，采用简化的等效器件建立数学分析模型，利用ANSYS对这种对偶子微悬臂梁进行模拟仿真分析，得出微悬臂梁的振型、固有频率及其在受外加负载时的形变和电压输出。同时分析微悬臂梁的几何尺寸对它们的影响，以便更好地指导实际工艺。

英文摘要：

A new type of twin piezoelectric micro-cantilever was proposed in this paper and the mathematical model was established based on the simplified equivalent device. The simulation analysis of the dual micro cantilever was carried out by using ANSYS. The vibration mode and inherent frequency of the cantilever, the deformation caused by the applied loads as well as the voltage output were given in this paper. Meanwhile, in order to guide the practical process, the influence of the dimension of micro-cantilever on them was also analyzed.