中文摘要：

通过ANSYS软件分析了平面电容传感器电容量与极板宽度和极板间距的关系,并选择合适的平面电容传感器探头的尺寸。针对非金属材料表面下水损伤的检测,提出了一种结构简单、操作方便的三电极平面电容传感器检测法。根据平面电容传感器检测材料相对介电常数的变化,深入研究了非金属材料表面下水柱损伤深度和水柱损伤区域大小对电容量的影响。仿真和初步实验结果表明,在一定范围内,测得的电容值随着水柱损伤深度和损伤区域大小的变化而变化。

英文摘要：

The effect of the electrode width and electrode spacing to coplanar capacitive sensor＇s capacitance is analyzed by ANSYS to select the suitable probe of coplanar capacitive sensor.A new method of three-electrode planar capacitive sensor which is simple in construction and easy to operate is proposed to detect the water damage under non-metallic materials.Basing on detecting the local dielectric permittivity variations is employed to study thoroughly the effect of water damage depth and water damage region to capacitance.Both of the simulation and the preliminary experimental results show that,the capacitance varies with the water damage depth and water damage region in the certain range.