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Use of numerical orthogonal transformation for the Zernike analysis of lateral shearing interferogra
  • ISSN号：1094-4087
  • 期刊名称：Optics Express
  • 时间：2012
  • 页码：1530-1544
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Dai, Fengzhao|Tang, Feng|Wang, Xiangzhao|Feng, Peng|Sasaki, Osami|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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