中文摘要：

金属磨粒是润滑油的主要污染物，也是机器系统运行状态的重要指标。介绍了基于电感原理的微流体油液金属颗粒计数器。该装置的设计使得油液中的磨粒与检测线圈之间具有很小的距离，因而具有较高的检测灵敏度，该方法可以有效区分铁磁性金属颗粒和非铁磁性金属微粒，目前实验条件下可以对液压油中19μm的铁颗粒和40μm的铜颗粒进行检测计数。对芯片激励源频率与微流体芯片检测分辨率的关系进行了实验研究和建模仿真，结果表明，若要提高芯片的检测分辨率，铁磁性金属颗粒检测需采用低频率激励，而对非铁磁性颗粒的检测需要尽量采用高的激励频率。

英文摘要：

Metal wear debris is an important contamination component in lubrication oil, and is also an essential index of machinery operation status. Based on inductive coupling counting principle, a microfluidic device for detecting the metal wear debris in oil is presented in this paper. In the designed device, the distance between the particles in oil and embedded induction coil is very small, which greatly improves the detection sensitivity. The relationship between the coil parameters and the induction change of the coil was investigated experimentally. This method can effectively distinguish ferrous and nonferrous metal particles in oil; and the 19 μm iron particles and 40 μm copper particles can be detected in current experiment condition. The resolution-frequency characteristic of the novel microfluidic chip was studied in experiment and modeling simulation. The results show that, to improve the chip detection resolu- tion,low excitation frequency is required for ferromagnetic metal particle detection, and high excitation frequency is required for non-ferromagnetic metal particle detection.