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Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic
  • ISSN号：1057-7157
  • 期刊名称：Journal of Microelectromechanical Systems
  • 时间：2012.12.12
  • 页码：1402-1409
  • 相关项目：硅基纳米结构机械加载尺度效应与表征方法研究
作者： Xu, Lei|Wang, Yuchen|Zhou, Hong|Liu, Yanxiang|Li, Tie|Wang, Yuelin|
同期刊论文项目
硅基纳米结构机械加载尺度效应与表征方法研究
期刊论文 42 会议论文 23 专利 10
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