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中文摘要：
考察了TiN/Ti多层膜韧性对其摩擦学性能的影响。采用磁过滤阴极弧沉积的方法制备了具有不同Ti子层厚度的TiN/Ti多层膜。用透射电镜对其层状结构及子层厚度进行了观察和分析,分别用Rockwell硬度计和UMT摩擦磨损试验机,进行了压痕测试和摩擦磨损实验。结果表明,TiN/Ti多层膜中Ti子层的加入显著提高了多层膜的韧性,相对TiN单层薄膜,当载荷较大时,多层膜的耐磨性有明显的改善。结合实验结果,讨论了TiN/Ti多层膜韧性对其耐磨性的影响。
英文摘要：
Influence of toughness on tribological performance of TiN/Ti multilayer coatings was investigated. Filtered cathode vacuum arc （FCVA） deposition method was applied to prepare the TiN/Ti multilayer coatings with different Ti sublayer thickness. Transmission electron microscope （TEM） was used to observe the laminate structure and individual layer thickness of the TiN/Ti multilayer coatings. Indentation test and wear experiment were carried out on Rockwell-C hardmeter and universal micro materials tester （UMT）, respectively. The experimental results showed that the introduction of Ti sublayer in TiN/Ti multilayers remarkably enhanced toughness of the multilayers. Under relatively large load, wear resistance of the TiN/Ti multilayer coatings was evidently improved comparing to TiN monolayer. Finally, according to the experimental results, the influence of toughness on wear resistance of the TiN/Ti multilayer coatings was discussed.
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