中文摘要：

提出一种基于双波干涉的台阶高度光纤在线干涉测量系统。利用光纤光栅（FBG）只反射布拉格波长的特性,使两个波长同时并独立地工作于同一个光纤干涉测量系统中,每个波长的干涉信号分别并同时被探测,将测量量程扩大为半合成波波长。利用反馈电路补偿环境干扰对光纤干涉测量系统的影响,使光纤干涉测量系统适合于在线测量。本光纤干涉测量系统可测量的最大台阶高度达1mm,测量分辨率小于1nm。

英文摘要：

An optical fiber dual-wavelength interferometric system,which is suitable for on-line measurement of step heights with high precision and without the need of each wavelength working individually in sequence to perform the measurement,is proposed. By employing the characteristic of a fiber Bragg grating of reflecting Bragg wavelength, two different wavelengths are working simultaneously and independently in the same optical fiber interferometric system,and two interferometric signals of each wavelength can be detected simultaneously and respectively. The measurement range is expanded to half of a synthetic wavelength. The system is stabilized by a feedback loop which compensates the influence induced by the environmental disturbances, and thus the system is robust enough for on-line measurement. The system is capable of measuring step heights as large as 1 mm and the measurement resolution is less than 1 nm.