中文摘要：

采用直流磁控溅射方法，以Cu-Zn-Sn合金为靶材，结合后续硫化工艺成功制备出高质量Cu2ZnSnS4（CZTS）薄膜。利用X射线衍射仪、拉曼光谱仪、场发射扫描电子显微镜和能量色散谱对Cu-Zn—Sn（CZT）前驱体及CZIS薄膜的结构、形貌和组分进行了表征，并使用紫外．可见分光光度计测量了CZTS薄膜的吸收光谱。研究结果表明：直流溅射的溅射功率和工作气压会影响CZTS薄膜的质量。采用30W功率，在1Pa气压条件下直流溅射制备的CZT前驱体薄膜形貌均匀致密，经硫化后可得到接近化学计量比、高质量、单一锌黄锡矿结构的CZTS薄膜，其光学禁带宽度约为1．49eV，适合作为薄膜太阳能电池的吸收层材料。

英文摘要：

The high quality Cu2ZnSnS4（CZTS）coatings were synthesized by DC magnetron sputtering with a Cu-Zn-Sn alloy target, followed by ex-situ sulfurization. The impacts of the synthesis conditions on it optical properties were eval-uated. The CZT precursor and CZIS coatings were characterized by X-ray diffraction, Raman spectroscopy, scanning elec-tron microscopy, energy dispersive spectroscopy, and UV speetrophotometer. The results show that the sputtering power and pressure strongly affect the quality of the CZTS coatings. The high quality kesterite phase CZTS coatings, synthesized at the optimized pressure of 1 Pa and sputtering power of 30 W,and sulfurized in sulfur atmosphere,have a nearly ideal stoi-chiometric ratio. We suggest that the CZTS coatings can be a promising solar-cell absorption material because its absorp- tion coegleient in the visible-light range is higher than 104 cm^-1 and its optical band gap is close to 1.49 eV.