中文摘要：

微射流水导激光加工是利用Nd：YAG激光在微射流击穿阈值中全反射传输作用于加工工件上，加工激光经过不同轴方向速度的微射流水导传输后以不同模式叠加，其加工峰值和能量分布得到改变。实验中，激光在微射流中分布峰值下降，光强分布均匀，加工效果相当于提高并展宽脉冲宽度，达到加工阈值。从理论上分析激光在微射流分布影响下能量分布变化，并模拟水导激光加工及波导传输机理，分析对于激光加工效率的影响。研究结果对进一步系统地提高改善微射流水导激光加工质量，尤其在以该加工方式参与的激光精密、超精密加工中，提高其应用范围有着重要参考价值。

英文摘要：

In the traditional laser micro-jet, the multi-model Nd:YAG processing laser is transmitted through the Total Reflec- tion in the flexible extending micro-jet and is reformed the traditional laser energy distribution. Due to the impact of the micro- jet, the energy distribution of laser micro-jet is reformed conventional laser Gaussian energy distribution into flattened uniform distribution, so that more of the processing laser has reached the processing threshold value, and involved in the processing. A series of validation experiments jets into guided to improve laser energy distribution more uniform energy distribution, in con clusion, processing efficiency will be enhanced and applied in the laser precise processing and super precise processing as well.