中文摘要：

针对硅基半导体电光热多场耦合特性及电调控问题,引入泊松方程和载流子连续性方程来计算载流子输运过程的浓度分布,利用德鲁德-洛伦兹公式和K-K关系式考虑载流子浓度变化对于光折射率和吸收系数的影响,并根据电磁耗散求解热沉积项。通过对半导体基本方程、电磁波动方程和能量方程的耦合方程组进行有限元求解,模拟并分析了电光热三者耦合作用下硅基半导体介电属性及光传输行为随外加电压、载流子初始浓度、换热系数等影响因素的变化规律。研究指出了半导体P区表面反射光电场模随外加电压的降低而升高,随换热系数的增大而降低的规律。利用该机制给出了对反射光强空间分布进行电热调控的方案。

英文摘要：

In order to study the silicon based semiconductor＇s electro-optic-thermal muti-field coupling characteristics and electric modulation problems,both the Poisson equation and the carrier continuity equation were introduced to calculate the carrier concentration distribution in the carrier transport procession. Drude Lorentz relation and K-K relation were also employed to discuss the effect of the carrier concentration on the refractive index and absorption coefficient. The heat deposited items were obtained by calculating electromagnetic dissipation. The coupled semiconductor basic equation,electromagnetic wave equation and energy equation were solved by using finite element method. With the effect of external voltage,initial concentration of carrier and heat transfer coefficient,the change of dielectric properties,optical transmission behavior of silicon based semiconductor were also analyzed by coupling solution and analysis. The results show that the reflective optical field mode of the semiconductor P area increases with the increasing of the applied voltage,and decreases with the increasing of the heat transfer coefficient. Using this mechanism,a scheme of electric thermal modulation for the space distribution of the reflection intensity was presented.