中文摘要：

劈啪作响的免职涂层在电子横梁(EB ) 上提供重要优点免职，包括的高收拾行李的密度，环境稳定性和极其低的损失。但是固有的高压缩的压力尽最大努力影响它的申请激光系统。这篇论文描述一篇小说扔的高损坏阀值激光镜子的技术可行性遥远的血浆劈啪作响技术。这种技术基于从目标遥远地产生集中的血浆然后有磁力地驾驶血浆到目标认识到劈啪作响的完整的制服。在目标电压和目标电流之间的伪独立提供我们很灵活的参数调节，特别为电影压力控制。免职条件被优化充分让步氧化并且低压缩压力单身者层 HfO2 和 SiO2。为在 1064 nm 的 HfO2/SiO2 激光镜子的 43.8 J/cm2 的高损坏阀值被获得。第一次，劈啪作响的遥远的血浆成功地在与高效扔激光镜子被使用。

英文摘要：

Sputtering deposition coatings offer significant advantages on electron beam （EB） deposition, including high packing density, environmental stability and extremely low losses. But the inherent high compressive stress affects its application in high power laser system. This paper describes the technical feasibility of high damage threshold laser mirrors deposited by a novel remote plasma sputtering technique. This technique is based on generating intensive plasma remotely from the target and then magnetically steering the plasma to the target to realize the full uniform sputtering. The pseudo-independence between target voltage and target current provides us very flexible parameters tuning, especially for the films stress control. Deposition conditions are optimized to yield fully oxidized and low compressive stress single layer HfO2 and SiO2. The high damage threshold of 43.8 J/cm^2 for HfO2/ SiO2 laser mirrors at 1064 nm is obtained. For the first time the remote plasma sputtering is successfully applied in depositing laser mirrors with high performance.