中文摘要：

碳基于 nanotube (CNT ) 察觉到元素被介绍，它由底层，绝缘的层，电极，碳 nanotube 和测量电路组成。察觉到的部件是 CNT 的一个单身者或数组，它位于二个电极。基于 CNT 的察觉到元素被 CVD (化学蒸汽免职) 制作 -direct-growth 在上微电极。机电的性质的察觉到的模型和测量方法也被介绍。最后，电压水流特征被测量，它证明基于 CNT 的察觉到元素有好电的性质。CLC 数字 TP212.14 Antrag GZ 398， Ghinesisch-Deutsches Zentrum f 眉 r Wissenschaftsf ? rderung。这个工作被中国(No.50505018 ) 的国家自然科学基础部分同意，为高等教育(号码 20030003024 ) 和中国博士后的科学基金会资助(号码 2005038068 ) 的博士节目专业化研究资金。

英文摘要：

A carbon nanotube-based（CNT） sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD （chemical vapor deposition）-direct-growth on microelectrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.