中文摘要：

针对谐振腔微扰法测湿过程中，腔体尺寸随温度变化对测湿结果影响显著的问题，提出了温度补偿的实验方案。根据谐振腔体积微扰原理，对温度补偿原理进行了分析，推导了腔体尺寸变化量与频偏的关系，设计了温度补偿实验系统方案，并对实验中的温度控制系统进行了分析。该温度补偿系统结构简单、成本适中，并对提高谐振腔法微水测量精度具有重要意义。

英文摘要：

Aiming at the of impact of wet significant problem in the process of hydrogen humidity measurement, which caused by the effect of resonant cavity size changes with the temperature, an experimental suggestion is proposed for temperature compensation. Based on volume perturbation theory, the temperature compensation principle was analyzed; the connection between the resonant cavity size changes and frequency-offset was also conducted. A program of temperature compensation experimental system was given in this paper, in which the temperature control system was improved. The structure of this system is very simple, and it can greatly improve the accuracy of resonant cavity micro-water measurement method with low cost.