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Homologous temperature dependence of global surface scaling behaviors of polycrystalline copper film
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  • 相关项目：基于统计学习模型的金属Cu互连体系扩散阻挡层性能的表征
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基于统计学习模型的金属Cu互连体系扩散阻挡层性能的表征
期刊论文 18 会议论文 14
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