应用偏靶射频磁控溅射方法在SrTiO3(001)单晶衬底上制备了三重价态(Mn3+,Mn4+,Mn5+)锰氧化物薄膜La1-x-yCaxKyMnO3.这种薄膜具有钙钛矿结构,A位拥有La3+,Ca2+和K+三种离子,对应的B位为Mn3+,Mn4+和Mn5+三重价态离子共存.通过18kW高能X射线衍射仪和D8X射线面探衍射仪检测证实制备的薄膜为取向多晶薄膜.原子力扫描图像显示薄膜表面平整,且随薄膜厚度增加表面平整度起伏增大.表面光电压测试显示,该薄膜具有明显的光生电压信号.
Thin films of the perovskite manganese oxides with three oxidation states of Mn3+-Mn4+-Mn5+ were successfully prepared on the SrTiO3(001)substrates by off-axis radio frequency magnetron sputtering.The structure of the thin film is cubic with Pm3m space group,consisting of La3+,Ca2+ and K+ three kinds of ions occupied in A sites and three oxidation states of manganese in B sites,respectively.The as-made La1-x-yCaxKyMnO3 thin films are oriented multi-crystal epitaxial forms,as tested by the high energy(18 kW)X-ray diffraction and D8 discover X-ray diffraction with General Area Detector Diffraction System(GADDS).The AFM photographs show that the surface of the films is smoothy and the root-mean-square(RMS)increases along with the increase of the thickness.The results of the surface photovoltage(SPV)spectroscopy shows relatively strong signal,indicating the ability for the conversion of photoelectricity.