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中文摘要：
以体硅为衬底，采用微机械加工技术（MEMS）制作了七通道的可植入到脑皮层的微探针，用于记录神经电信号．从生物相容性、减小植入损伤、工艺制作难度等方面考虑，制作了以二氧化硅／硅（SiO2／Si）为主体的微探针，并详述了其具体制作工艺流程．扫描电镜（SEM）照片显示微探针针长3mm、针宽100μm、针厚约为20μm，各个记录点直径10μm、间距120μm，实现了各通道之间良好的信号隔离．微探针距离针尖1mm范围内的针宽以一定弧度由100μm逐渐变窄，同时针尖锥角为6°，此种结构有利于减小植入时对脑组织的损伤．通过体外测试得到，当频率由10kHz增加到10MHz时，微电极各个通道阻抗由150．5kΩ降低到6．0kΩ．
英文摘要：
An implantable seven-channel silicon-substrate microprobe was developed for cortical neural signal recordings by micro-electromechanical system （MEMS） technology. Silicon dioxide/silicon configured the microprobe considering the biocompatibility, minimization of insertion trauma and manufacturing complexity, etc. The detailed fabrication process was outlined with four masks used. Scanning electron microscope （SEM） images showed that the probe shank was 3mm long, 100 μm wide and 20 m thick with the 10 μm-diameter circle recording sites spaced 120 μm apart for good signal isolation. To facilitate the penetration and minimize the cortical trauma, the probe tip taper angle was designed as 6 degrees. The plot of the single recording site impedance versus frequency was shown by test in vitro and the impedance declines from 150. 5 kΩ to 6.0 kΩ with frequency changing from 10k to 10 MHz.
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