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An electric field microsensor based on the structure of piezoelectric interdigitated cantilever beam
  • 期刊名称：Journal of Electronics
  • 时间：0
  • 页码：-
  • 相关项目：单片集成旋转谐振式微型三维电场传感器研究
作者： Jianhua Tong|Yu Wang|Dongming Fang|Shanhong Xia|
同期刊论文项目
单片集成旋转谐振式微型三维电场传感器研究
期刊论文 14 会议论文 4
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High performance electric field micro sensor with combined differential structure
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