中文摘要：

利用磁控溅射、电子束光刻和反应离子刻蚀等微加工技术,开展了超导纳米线单光子探测器（SNSPD）的研究.通过对SNSPD的设计和制备工艺参数的优化,成功制备出了高质量的SNSPD.单光子检测实验表明,制备的SNSPD对660nm波长的光信号,系统检测效率可达30%,对1550nm波长光信号,最大系统检测效率为4.2%.在平均暗计数小于10c/s的情况下,系统检测效率大于20%（660nm）和3%（1550nm）.

英文摘要：

In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors （SNSPD）. Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4. 2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c /s,the detection efficiencies were 20% （660 nm） and 3% （1550 nm） with the SNSPD fabricated with above mentioned methods.