中文摘要：

研究一种新型无热化聚合物／二氧化硅混合波导组成的硅基二氧化硅阵列波导光栅．阵列波导光栅对温度的依赖性受波导物质的折射率和波导芯的尺寸影响．通过调节这些参量就可以减小温度对阵列波导光栅的影响．优化得到混合型阵列波导光栅在温度20～70℃范围内波谱漂移小于常规型AWG结构的5％．

英文摘要：

A novel athermal arrayed waveguide grating （AWG） is demonstrated, which is composed of silica/polymer hybrid materials on a silicon substrate. The temperature-dependent wavelength shift of the AWG depends on the refractive indices of the materials and the size of the waveguide. The athermalization of the AWG can be realized by the control of the material and structural parameters of the waveguide. When the temperature changes range from 20℃ to 70℃, spectrum shift of athermal AWG is less than 5 of the normal silica/silicon AWG structure,