中文摘要：

模拟并设计了一种基于表面微机械加工的平面MEM电感,提出了它的等效电路模型并给出模型中参数的提取方法。由模拟结果验证了该等效电路具有较高的精度,误差在8%以内。设计的一个3.6nH的平面MEM电感的品质因数超过20,自谐振频率超过15GHz。由平面MEM电感构成的5阶LC低通滤波器的-3dB带宽为3.7GHz,0-3GHz内的插入损耗低于1dB。

英文摘要：

This paper simulates and designs planar MEM inductors based on surface-micromachining technology, and presents equivalent circuit models of the inductors and its parameters extraction methods. Model prediction shows excellent agreement with the simulated data over a wide frequency region, and the contrast between model and simulation is within 8%. The quality factor（Q） of a 3. 6 nH inductor is higher than 20 and the self-resonant ffequency（fsr） is greater than 15 GHz. The -3 dB bandwidth of a low-pass filter consists of the MEM inductors is 3. 7 GHz, and insertion loss within 0-3 GHz is less than 1 dB.