中文摘要：

设计并分析了一种基于游标效应的光学传感器。采用截面尺寸为220nm×500nm的SOI矩形波导来进行分析。传感器的灵敏度为4.5×104 nm/RIU,探测极限低于10-4 RIU。该传感器最重要的优点是,即使器件有很高的传输损耗和低的Q因子,仍有很高的灵敏度和低的探测极限。分析了热光效应对基于游标效应传感器的影响。分析结果也同样适用于其他基于游标效应的传感器。

英文摘要：

In this paper,designed and analyzed is an optical sensor based on Vernier effect.Rectangular waveguide with the dimension of 220nm×500nm based on silicon-on-insulator（SOI）is chosen to make analysis.Its sensitivity is 4.5×104 nm/RIU and the detection limit is less than 10-4 RIU.The most important virtue is that even if the device has a high loss and a low Q-factor,it has an ultrahigh sensitivity and a low detection limit.The influence of thermo-optic（TO）effect on the optical sensor is analyzed distinctly.The result is also suitable to other sensors based on Vernier effect.