半导体列阵量子效率高,输出波长范围涵盖570~1600nm,工作寿命可达数百万小时,叠层列阵可提供超高功率激光输出,在工业、医学等很多领域具有非常广阔的应用前景。但列阵在自由运行时,各发光单元发出的光是不相于的,输出质量差,采用1/4Talbot外腔镜耦合技术,列阵实现了空间锁相最高阶超模,然而唯有基超模远场分布是中心单瓣结构,输出接近衍射极限。为得到最小谱宽、最小发散角、最大功率密度输出,必须将外腔镜倾斜β=A/2d(A为工作波长,d为列阵周期),这使得仅有基超模光能成像于发光单元内而被允许振荡。应用此技术于超大功率二维半导体列阵相干锁相时,尽管冷却子系统保障了持续出光,但一段时间后,残余热效应等将导致外腔镜发生随机形变,使口漂移超过阈值使基超模失配,非基超模振荡使远场为非中心单瓣结构,极大地恶化了输出质量。可见,必须适时补偿口漂移,为此,在列阵超模选择稳定性分析基础上,研发了并路自适应稳模技术,并由置于特定结构中的传感探测光源、微透镜等构成的传感探测子系统、补偿子系统实现。试验结果显示,口漂移被及时感知补偿,基超模光稳定占优地成像于发光单元内,使输出光质量高,列阵性能被有效增进,在满足有高品质需求的应用上意义重大。
Laser diode array can operate with high quantum efficiency, output wavelength can range from 570 nm to 1 600 nm, and hours of work can be even longer than mega hours. Multi-array stack of Laser Diode Arrays (LDAs) can supply ultrahigh power laser beam and are becoming widespread sources for many kinds of applications involving regions of industries, medicine etc. However, a free-running LDAs always operate on a wide bandwidth with the poor coherence, the laser beam cannot be focused to a small spot with a well-defined intensity profile, and the requirements of high quality laser applications can not be met. So external quarter- Talbot cavity is employed for phase-locking, but corresponding supermode is the out-of-phase supermode, and among all superulodes, only the far-field of the fundamental supermode is central single-lobe, the output is near diffraction-limited, the angle of divergence is the smallest, the concentration of light beam is the greatest, the laser spectrum is the narrowest, thus it is necessary for the external mirror to be tilted by an angle ofβ = λ/2d, here, A is the operating wavelength, and d is the period distance, this makes feedback light from array lasing in the fundamental supermode be imaged dominantly in lasing aperture but makes the others be imaged exactly in between lasing apertures, thus only the fundamental supermode be allowed oscillating, but if the output power of a LDAs is ultra high,after it emits a short time, though there is cooling subsystem, so the LDAs can operate continuously, induced by the residual thermal radiation etc, the external mirror will be de- formed stochastically to make fl drift off λ/2d, with the output power increasing, the margin will up to the cri- tical value, the tilt in degree will mismatch the fundamental supermode, feedback light from array lasing in the fundamental supermode won't be imaged dominantly in lasing aperture, this result in LDAs allowing the other supermode oscillating, the far field distribution will be not single-lobe far f