中文摘要：

液压油中的磨损颗粒会引发液压系统故障，同时也是机械故障信息的重要载体，因此对液压油中的磨损颗粒进行检测和分析十分重要。基于电感测量技术和微流体技术，设计出微流体油液检测芯片。在该芯片中，磨损颗粒与平面电感线圈的理论间距为0，检测装置的灵敏度得到极大地提高。本文通过数值仿真和实验验证手段研究了平面电感线圈几何参数与电感变化量的关系。结果表明，当铁磁质颗粒通过检测通道时，测得的电感变化量随着线圈匝数的增加而增大，但是随着线圈线宽的增大而减小。本研究为解决油液金属颗粒检测问题提供了一个良好的方案。

英文摘要：

Wear debris in hydraulic oil causes faults of hydraulic system mostly and it is also an important mechanical fault information cartier, so it is crucial to check the wear debris in hydraulic oil. Based on inductance measurement principle and microfluidic chip technology, an oil detection mierofluidic chip was designed. The proposed chip has the advantage that in theory the distance between wear debris in oil and the embedded planar inductance coil is O,which greatly improves the sensitivity of the detection device. With numerical simulation and experiment, the relation between the coil geometry pa- rameters and inductance change of planar inductor coil is analyzed. The result indicates that when the ferrous metal parti- cles go through the detection channel ,the measured inductance change increases with the number of coil turns and decrea- ses with the coil line width. This study provides a very good research scheme for oil metal particle detection.