中文摘要：

考虑了原子在发生层间扩散过程中Ehrlich—Schwoebel势垒的作用，构造了四边形基底表面上薄膜三维生长的动力学MonteCarlo（MC）模型。在这个模型中，原子表面运动的三种动力学过程包括沉积、扩散和脱附过程，它们相互影响又相互独立，依据各自的概率发生。在不同生长条件下，模拟出薄膜的三种生长模式以及相应的薄膜三维生长形貌图。对计算结果的分析表明，ES势垒和在ES势垒作用下基底温度和沉积速率等因素对薄膜的三维生长模式有重要影响。

英文摘要：

A kinetic Monte Carlo model describing the three-dimensional thin film growth on square lattice substrates was presented, in which the two-dimensional Ehrlich-Schwoebel barrier for an adatom to diffuse down a surface step was taken into account. Three principle dynamic processes, namely deposition, diffusion and re-evaporation were included in the description of surface motion of the adatoms. It is considered that these three dynamic processes are interact on each other and will occur randomly according to their rates. Three growth modes and corresponding island morphologies under different growth conditions were simulated. By analysing the simulate results, It is educed that the important influence of Ehrlich-Schwoebel Barrier on surface morphology, and under the action of Ehrlich-Schwoebel Barrier, the temperature of substrate and deposition rate also play an important role in thin film growth modes.