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The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by su
  • 期刊名称：REVIEW OF SCIENTIFIC INSTRUMENTS
  • 时间：0
  • 页码：033501-1-033501-3
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Y. N. Wang|B. Ke|X. H. Wen|H. Y. Zhou|F. Ding|X. D. Zhu|L. Wang|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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