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Flying-Height Measurement With a Symmetrical Common-Path Heterodyne Interferometry Method
  • ISSN号：0018-9464
  • 期刊名称：IEEE Transactions on Magnetics
  • 时间：0
  • 页码：928-932
  • 语言：英文
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Meng, Yonggang|Song, Nanhai|Lin, Jing|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 66 会议论文 12 获奖 7
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