中文摘要：

研究了一种基于压电原理的甲烷传感器。运用化学氧化聚合法和层层自组装法制备了对甲烷气体敏感的PANI/PdO复合薄膜,通过溅射工艺将薄膜生成在压电材料上,利用敏感薄膜对甲烷的吸附改变晶振频率,从而检测出甲烷气体的含量。实验表明：压电甲烷传感器具有较好的选择性,在0%~2%的甲烷体积分数范围内具有较好的线性输出。

英文摘要：

A kind of methane sensor based on the principle of piezoelectricity is developed.The PANI/PdO composite thin film is fabricated by chemical oxidative polymerization of aniline with PdO nanoparticles,and the PANI/PdO thin films which is sensitive to methane is fabricated through layer-by-layer self-assembly method.The film is deposited on the piezoelectric material by sputtering.It accomplishes the detection of CH4 by the absorption of CH4 which can change the oscillation frequency of the piezoelectric crystal.The experimental results show that the sensor has good selectivity.And the output of the sensor has good linear relationship with the volume fraction range of CH4 0 % ~2 %.