中文摘要：

详述了一种真空环境下的微推力测试方法:利用杠杆力的放大原理,将微推力值放大从而能够被传感器检测到。测试系统以真空油作为阻尼液,既适应了真空环境又使噪声信号得到了明显的减弱。实验结果表明在几百帕的真空绝压下推力值变化不大;流量在较粗的真空度下已达到临界值;流量和推力随入口压力的增加呈线性增加趋势。这些实验方法和规律对真空环境下的微推力测量具有一定的借鉴和帮助作用。

英文摘要：

A micro-thrust test method in vacuum was described in detail in this article.Micro-thrust force was enlarged by a lever,and then could be sensed by force sensor in this test method.Vacuum oil served as damping liquid which weakened noise signal while it was compatible with vacuum environment.Experimental results show that thrust force varies little within a different background pressure range in several hundred Pa;mass flow rate reaches its maximum value in coarse vacuum;and both of them increase linearly w...