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Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass
  • ISSN号：1539-4522
  • 期刊名称：APPLIED OPTICS
  • 时间：2014
  • 页码：6913-6919
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 彭文强|关朝亮|李圣怡|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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