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中文摘要：
首先对无损伤铜薄膜试件进行疲劳试验，测得S-Ⅳ曲线。然后预制疲劳损伤程度为40％的铜薄膜试件，利用准分子激光器对其进行损伤修复。通过对比激光辐照处理前后试件的剩余寿命，可以得到如下结论，对于损伤程度为40％的25μm铜薄膜试件，最佳修复能量度约为5×10^3J/m^2，最佳脉冲个数约为30；能量密度对于修复效果的影响程度强于脉冲个数的影响程度；运用激光辐照进行损伤修复是切实可行的。
英文摘要：
Fatigue test was carried out to obtain S--N curve for undamaged cooper film first. Then specimen with a damage degree of 40% was prepared. Excimer laser was finally used to repair the fatigue damage. By comparing data pre- and post- processing, the main results are as follows： The best energy density is about 5×10^3J/m^2 and the best pulse number is about 30. The influence degree of energy density on repairing effect was stronger than that of pulse number. Laser irradiation processing is a feasible way to damage repair.
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