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Polarization effects induced by the bi-layer attenuated phase-shiftmask and their impacts on near-fi
  • ISSN号：0030-4026
  • 期刊名称：Optik
  • 时间：2013
  • 页码：6261-6264
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Yang, Liang|Li, Yanqiu|Liu, Lihui|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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