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A novel design for maskless direct laser writing nanolithography: Combination of diffractive optical
  • ISSN号：0030-4018
  • 期刊名称：Optics Communications
  • 时间：2013.9.1
  • 页码：49-53
  • 相关项目：蓝光激发SbTe基半导体薄膜材料光学非线性效应诱导的亚波长光斑形成特性与纳米光刻应用的基础研究
作者： Yikun Zha|Jingsong Wei|Fuxi Gan|
同期刊论文项目
蓝光激发SbTe基半导体薄膜材料光学非线性效应诱导的亚波长光斑形成特性与纳米光刻应用的基础研究
期刊论文 24 会议论文 3 专利 1 著作 3
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