中文摘要：

采用脉冲激光沉积技术（PLD）在{001}LaAlO3（LAO）衬底上生长YBa2Cu3O7-x（YBCO）薄膜,并通过极图、摇摆曲线以及倒易空间图谱等高分辨X射线衍射技术（HRXRD）对其微结构进行表征。结果表明,YBCO薄膜的晶粒取向主要为{001}YBCO//{001}LAO,〈100〉YBCO//〈100〉LAO,但还有2%的{001}YBCO//{001}LAO,〈110〉YBCO//〈100〉LAO取向。摇摆曲线结果表明,YBCO的面外取向有一定的漫散（宽度为0.75°）;薄膜面内存在90°±0.65°〈110〉孪晶畴结构,主要是由四方到正交的相变过程中较大的局部应力以及〈100〉和〈010〉方向应力差异引起的。

英文摘要：

YBa2Cu3O7-x （YBCO） superconducting film was fabricated on {001} LaAlO3 （LAO） substrate by pulse laser deposition （PLD）, and its microstructure was examined by high resolution X-ray diffraction technology （HRXRD）, such as pole figure, rocking curve, reciprocal space mapping. The results show that the YBCO crystalline alignment is almost {001}YBCO//{001}LAO, 100YBCO//100LAO besides 2% {001}YBCO//{001}LAO, 110YBCO//100LAO. The out-plane alignment of YBCO is some spreading （the breadth is 0.75°）. There are 90°±0.65°110 twin domains in the film, which is caused by the high local stress and stress difference between 100 and 010 during the tetragonal to orthorhombic phase transition.