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<br class="MsoSubtitle" /> Dynamic properties of a metal photo-thermal micro-actuato
  • ISSN号：0003-6935
  • 期刊名称：Applied Optics
  • 时间：0
  • 页码：-
  • 相关项目：基于同步辐射LIGA技术的微纳驱动器件制备及其驱动新方法研究
作者： B. Shi, H. Zhang, F. Yi, J. Jiang, D. Zhang*|
同期刊论文项目
基于同步辐射LIGA技术的微纳驱动器件制备及其驱动新方法研究
期刊论文 38 会议论文 2
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